QUATRON-L

linear plasma beam source

Features and description

Linear scalable plasma source for use in various coating systems. The beam length of the source is determined by the dimensions of the substrate and the width (shorter side of the beam) depends on the thermal load on the extraction grid or on the location and weight of the source.

QUATRON-L - technical data

Beam length
270 mm (QUATRON-L 270)
600 mm (QUATRON-L 600)
800 mm (QUATRON-L 800)
Beam width
140 mm (QUATRON-L 270)
100 mm (QUATRON-L 600)
100 mm (QUATRON-L 800)
Beam area, ca.
2 * 10^3 ... 1 * 10^-5 mbar
Gas
all gases
RF-Power, max.
5000 Watt
Energy up to
2000 eV
Current density up to
3,6 mA/cm²
Matching
manual, automatic
Extraction net
tungsten, stainless steel, etc...
Cooling
Water
Applications
Roll-to-Roll Coaters, PVD, PECVD, Etching, Cleaning, etc…

Other QUATRON-L sizes and specifications on request

Product information (PDF):
QUATRON Series

ADDRESS

HS-Group GmbH
Porschestrasse 12
63512 Hainburg
Germany

Tel. +49 6182 - 93 51 0
Fax +49 6182 - 93 51 11

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