Linear scalable plasma source for use in various coating systems. The beam length of the source is determined by the dimensions of the substrate and the width (shorter side of the beam) depends on the thermal load on the extraction grid or on the location and weight of the source.
QUATRON-L - technical data
270 mm (QUATRON-L 270) 600 mm (QUATRON-L 600) 800 mm (QUATRON-L 800)
140 mm (QUATRON-L 270) 100 mm (QUATRON-L 600) 100 mm (QUATRON-L 800)