QUATRON-L
linear plasma beam source
Features and description
Linear scalable plasma source for use in various coating systems. The beam length of the source is determined by the dimensions of the substrate and the width (shorter side of the beam) depends on the thermal load on the extraction grid or on the location and weight of the source.
QUATRON-L - technical data
Beam length | 270 mm (QUATRON-L 270) 600 mm (QUATRON-L 600) 800 mm (QUATRON-L 800) |
Beam width | 140 mm (QUATRON-L 270) 100 mm (QUATRON-L 600) 100 mm (QUATRON-L 800) |
Beam area, ca. | 2 * 10^3 ... 1 * 10^-5 mbar |
Gas | all gases |
RF-Power, max. | 5000 Watt |
Energy up to | 2000 eV |
Current density up to | 3,6 mA/cm² |
Matching | manual, automatic |
Extraction net | tungsten, stainless steel, etc... |
Cooling | Water |
Applications | Roll-to-Roll Coaters, PVD, PECVD, Etching, Cleaning, etc… |
* Other QUATRON-L sizes and specifications on request
Product information (PDF):
QUATRON Series
